Method for vibration measurement and interferometer

Details Method for vibration measurement and interferometer Method for vibration measurement and interferometer

2005-11-29

2005-11-29

Turner, Samuel A. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

06970251

ABSTRACT:
A Method for measuring vibrations in small and microscopic objects is disclosed. The method includes the steps of vibrating the object at a frequency, illuminating the object with a light source which is phase modulated at the same frequency, collecting data from a detector array, operating an algorithm to calculate the size of interference modulation between the light waves, operating an algorithm based on multiple calculation of the modulation at different vibration phases between the excitation of the object on one hand, and the reference phase modulation on the other, and operating an algorithm based on use of the result from the calculation of the second modulation, calculating amplitude values and phase values for the vibration of the surface of the object.

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patent: 00/03197 (2000-01-01), None
patent: 00/14477 (2000-03-01), None

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