Method for vapor phase deposition of gallium nitride film

Details Method for vapor phase deposition of gallium nitride film Method for vapor phase deposition of gallium nitride film

1987-08-17

1988-12-20

Childs, Sadie

Coating processes

Coating by vapor, gas, or smoke

427255, 4272552, C23C 1630, C23C 1634

Patent

active

047924675

ABSTRACT:
A process for depositing a gallium nitride film on a substrate. A source compound is provided which has the formula:

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