Coating processes – Coating by vapor – gas – or smoke – Metal coating
Patent
1985-09-11
1987-06-30
Childs, Sadie L.
Coating processes
Coating by vapor, gas, or smoke
Metal coating
118718, 118719, 118733, 4272551, 4272555, C23C 1606
Patent
active
046769994
ABSTRACT:
For vacuum deposition plating steel strip, a vacuum deposition plating apparatus is used including an inlet-side vacuum sealing device provided in front of a vacuum deposition plating chamber, with an inlet-side inactive gas replacement chamber provided between the inlet-side vacuum sealing device and an annealing furnace. An outlet-side vacuum sealing device is provided at the rear of the vacuum deposition plating chamber, with an outlet-side inactive gas replacement chamber provided between the outlet-side vacuum sealing device and the atmosphere. An inactive gas circulating/purifying device circulates an inactive gas from vacuum chambers of both the vacuum sealing devices to atmospheric pressure chambers of both the vacuum sealing devices and removes water, oil and oxygen from the inactive gas. Oxygen and hydrogen in the inactive gas are regulated to provide 60 ppm or less of oxygen and 0.2 to 2.0% of hydrogen, and also to regulate the dew point of the inactive gas to -50.degree. C. or less. Further, a pressure P.sub.1 in the annealing furnace, a pressure P.sub.2 in the inlet-side inactive gas replacement chamber, and a pressure P.sub.3 in the outlet-side inactive gas replacement chamber are maintained at atmospheric pressure or more. A value of P.sub.1 -P.sub.2 can be kept at 0 mmAq or more, and the concentration of hydrogen in the inlet-side inactive gas replacement chamber is held to 2.0.degree. or less.
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Aiko Takuya
Furukawa Heizaburo
Katoh Mitsuo
Kittaka Toshiharu
Nakanishi Yasuji
Childs Sadie L.
Mitsubishi Jukogyo Kabushiki Kaisha
Nisshin Steel Co. Ltd.
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