Method for using rinse spray bar in chemical mechanical polishin

Details Method for using rinse spray bar in chemical mechanical polishin Method for using rinse spray bar in chemical mechanical polishin

1995-06-02

1996-11-26

Kunemund, Robert

Fishing, trapping, and vermin destroying

1566361, 451287, 451 41, 134 6, 134 33, H01L 21304, H01L 21306, B08B 302

Patent

active

055785298

ABSTRACT:
A rinse spray bar (24), added to CMP equipment (10), provides complete and uniform wetting and rinsing of the polishing pad (12) for an improved process. The rinse spray bar has a first opening (26) running through a portion of its length and multiple second openings (28) connected to the first opening to create multiple flow paths for a rinse agent. These second openings (28) are capped with spray nozzles (36) on the bottom surface of the rinse spray bar so that the rinse agent can be sprayed out from the second openings at a pressure higher than ambient such that the sprays patterns overlap each other to ensure uniform wetting. An in-line valve (34) adjusts and controls the pressure of the incoming rinse agent through the input line (30) so that the spray nozzle pressure can be varied. The rinse spray bar can be used at every polishing pad station in the CMP apparatus.

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