Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2007-03-27
2007-03-27
Tugbang, A. Dexter (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603160, C029S603180, C029S603230, C029S603240, C216S022000, C216S047000, C216S048000, C216S087000, C205S118000
Reexamination Certificate
active
10881559
ABSTRACT:
Methods suitable for use in making a write coil of a magnetic head includes the steps of forming a seed layer made of ruthenium (Ru) over a substrate; forming, over the seed layer, a patterned resist having a plurality of write coil trenches patterned therein; electroplating electrically conductive materials within the plurality of write coil trenches to thereby form a plurality of write coil layers; removing the patterned resist; and performing a reactive ion etch (RIE) in ozone gas (O3) for removing exposed seed layer materials in between the plurality of write coil layers. Advantageously, the write coil layers remain undamaged from the RIE in the ozone gas. Other structures may be fabricated in a similar manner.
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Bonhôte Christian René
Le Quang
Hitachi Global Storage Technologies - Netherlands B.V.
Nader Rashod
Nguyen Tai Van
Oskorep, Esq. John J.
Tugbang A. Dexter
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