Method for use in making a write coil of magnetic head

Details Method for use in making a write coil of magnetic head Method for use in making a write coil of magnetic head

2007-03-27

2007-03-27

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603160, C029S603180, C029S603230, C029S603240, C216S022000, C216S047000, C216S048000, C216S087000, C205S118000

Reexamination Certificate

active

10881559

ABSTRACT:
Methods suitable for use in making a write coil of a magnetic head includes the steps of forming a seed layer made of ruthenium (Ru) over a substrate; forming, over the seed layer, a patterned resist having a plurality of write coil trenches patterned therein; electroplating electrically conductive materials within the plurality of write coil trenches to thereby form a plurality of write coil layers; removing the patterned resist; and performing a reactive ion etch (RIE) in ozone gas (O3) for removing exposed seed layer materials in between the plurality of write coil layers. Advantageously, the write coil layers remain undamaged from the RIE in the ozone gas. Other structures may be fabricated in a similar manner.

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