Method for use in making a write coil of magnetic head

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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C029S603160, C029S603180, C029S603230, C029S603240, C216S022000, C216S047000, C216S048000, C216S087000, C205S118000

Reexamination Certificate

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10881559

ABSTRACT:
Methods suitable for use in making a write coil of a magnetic head includes the steps of forming a seed layer made of ruthenium (Ru) over a substrate; forming, over the seed layer, a patterned resist having a plurality of write coil trenches patterned therein; electroplating electrically conductive materials within the plurality of write coil trenches to thereby form a plurality of write coil layers; removing the patterned resist; and performing a reactive ion etch (RIE) in ozone gas (O3) for removing exposed seed layer materials in between the plurality of write coil layers. Advantageously, the write coil layers remain undamaged from the RIE in the ozone gas. Other structures may be fabricated in a similar manner.

REFERENCES:
patent: 5972193 (1999-10-01), Chou et al.
patent: 6111724 (2000-08-01), Santini
patent: 6323127 (2001-11-01), Andricacos et al.
patent: 6356410 (2002-03-01), Chesnutt et al.
patent: 6461888 (2002-10-01), Sridhar et al.
patent: 6537461 (2003-03-01), Nakahara et al.
patent: 2001/0006245 (2001-07-01), Yunogami et al.
patent: 2003/0189786 (2003-10-01), McGeehin et al.
patent: 2003/0205553 (2003-11-01), Nakahara et al.
patent: 2003/0206373 (2003-11-01), Kato et al.

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