Method for use in forming a read sensor for a magnetic head

Details Method for use in forming a read sensor for a magnetic head Method for use in forming a read sensor for a magnetic head

2007-03-27

2007-03-27

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603120, C029S603150, C029S603160, C029S603180, C216S022000, C360S326000, C360S327000, C360S317000

Reexamination Certificate

active

10881439

ABSTRACT:
Methods for use in forming a CPP read sensor for a magnetic head are disclosed. In a particular example, a plurality of read sensor layers are formed over a first shield layer and a resist without undercuts is formed over the plurality of read sensor layers in a central region. With the resist in place, read sensor materials in side regions adjacent the central region are removed by milling to thereby form a read sensor structure in the central region. Insulator materials and metallic seed materials are then deposited in the side regions. High angle ion milling is performed to reduce a thickness of the insulator materials, the metallic seed materials, or both, along sidewalls of the read sensor structure. Magnetic hard bias materials are subsequently deposited over the metallic seed materials, and a second shield layer is formed over the structure after the resist is removed. Advantageously, the high angle ion milling more closely aligns the hard bias materials with a free layer structure in the read sensor structure such that the effectiveness of the hard bias materials is increased.

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