Method for treating surface of organic insulating film using...

Details Method for treating surface of organic insulating film using... Method for treating surface of organic insulating film using...

2006-11-07

2006-11-07

Schechter, Andrew (Department: 2871)

Liquid crystal cells, elements and systems

Particular structure

Having significant detail of cell structure only

C349S139000, C349S143000, C438S030000

Reexamination Certificate

active

07133100

ABSTRACT:
A fabricating method of a thin film transistor substrate according to the present invention includes the steps of forming on a substrate material a thin film transistor array including a plurality of signal lines; forming an organic insulating film on the substrate material on which the thin film transistor array has formed; patterning the organic insulating film; performing a surface treatment on a surface of the organic insulating film using helium plasma; and forming a transparent electrode layer on the organic insulating film.

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patent: 11-283934 (1999-10-01), None

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