Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2011-07-05
2011-07-05
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
Reexamination Certificate
active
07973907
ABSTRACT:
A method for treating a substrate before exposing the substrate to which a resist is applied, includes, rinsing the substrate to which a resist is applied, and holding the rinsed substrate in an atmosphere. The atmosphere substantially contains no moisture until conveying the substrate to an exposure apparatus.
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English Translation of JP 2005-268358 (dated Sep. 29, 2005).
Kawamura Daisuke
Matsunaga Kentaro
Miyoshi Seiro
Shiobara Eishi
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Kabushiki Kaisha Toshiba
Kim Peter B
Liu Chia-how Michael
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