Method for treating silane-containing gas

Details Method for treating silane-containing gas Method for treating silane-containing gas

1998-03-25

1999-10-05

Woo, Jay H.

Gas separation: processes

Liquid contacting

Inorganic gas, liquid particle, or solid particle sorbed

95233, 95237, 423240, 4232452, B01D 4700

Patent

active

059616954

ABSTRACT:
A silane-containing gas is treated by contacting it with a liquid containing silanes or disilanes which are higher boiling than the silanes in the silane-containing gas, thereby easily removing or reducing the amount of silanes in the gas and enabling the recovery of these silanes.

REFERENCES:
patent: 3689582 (1972-09-01), Wakiyama et al.
patent: 4276063 (1981-06-01), Lackey et al.
patent: 4782172 (1988-11-01), Niswonger et al.
patent: 4892568 (1990-01-01), Prigge et al.
patent: 4923687 (1990-05-01), Schork et al.
02674725 (English abstract).
EP 216292 (English abstract).

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