Method for treating dry film stripping and developing solution

Liquid purification or separation – Processes – Making an insoluble substance or accreting suspended...

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210725, 210727, 210731, 210778, 210912, C02F 154

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active

058007180

ABSTRACT:
A method of treating a spent dry film stripping and/or developing solution comprising the steps of adding about 0.01 to 15 grams of an aluminum source per liter of solution; adding about 0.05 to 25 grams of a metal precipitating agent per liter of solution; mixing the aluminum source, the metal precipitating agent and the solution with one another to form a mixture; adding an acid source to the mixture to lower the pH to less than about 6.5; and filtering the mixture to separate the metals and the photoresist from the remainder of the solution. The composition may also include 0 to 10 percent by weight of a dust-suppression agent, per liter of the solution, 0.1 to 10 grams of siliceous particulates per liter of spent stripper solution and/or an agent to enhance flocculation of the polymer precipitate.

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patent: 5308502 (1994-05-01), Brown
patent: 5615862 (1997-04-01), Gaudette

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