Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-09-26
2006-09-26
Pert, Evan (Department: 2826)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
Reexamination Certificate
active
07113842
ABSTRACT:
A method of transferring a multi-variate process control model from one RF-powered plasma processing chamber (the reference chamber) to another nominally identical RF-powered plasma processing chamber (the target chamber) comprises first determining a multi-variate process control model on the reference tool based upon sensor data,100. Then, a set of sensor data is taken for the reference chamber by running a designed experiment,102, and a corresponding set of sensor data is taken for the target chamber using the same designed experiment,104. The relationship between the reference and target chambers is determined by comparing the results of the designed experiments and calculating a transform matrix representing differences between the two chambers,106. Finally, the process control model is transformed from the reference chamber to the target chamber using the transform matrix thus obtained,108.
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Carbery Marcus
Martinez Francisco
O'Leary Kevin
Krasnow David M.
Pert Evan
Scientific Systems Research Limited
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