Optics: measuring and testing – Shape or surface configuration – By projection of coded pattern
Reexamination Certificate
2008-01-31
2011-11-15
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
Shape or surface configuration
By projection of coded pattern
Reexamination Certificate
active
08059280
ABSTRACT:
A method for mapping height of a feature upon a test surface is provided. The method includes projecting patterned illumination upon the feature, the patterned illumination having a plurality of distinct fringe periods. A first image of the feature is acquired while the patterned illumination is projected upon the feature. Relative movement is then generated between a sensor and the feature to cause relative displacement of a fraction of a field of view of a detector, the fraction being equal to about an inverse of the number of distinct regions of a reticle generating the pattern. Then, a second image of the feature is acquired while the patterned illumination is projected upon the feature. The height map is generated based, at least, upon the first and second images.
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Fisher Lance K.
Haugen Paul R.
Chowdhury Tarifur
Christenson Christopher R.
CyberOptics Corporation
Pajoohi Tara S
Westman Champlin & Kelly P.A.
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