Method for the temperature measurement of substrates, and...

Details Method for the temperature measurement of substrates, and... Method for the temperature measurement of substrates, and...

2008-12-19

2011-12-06

Smith, Richard A. (Department: 2841)

Thermal measuring and testing

Temperature measurement

In spaced noncontact relationship to specimen

C204S298030

Reexamination Certificate

active

08070356

ABSTRACT:
A method for measuring the temperature of substrates to be coated is disclosed. The substrates have an opening or a cavity, and the substrates are successively moved past a source of coating material. At least one substrate's temperature is measured during coating by at least one temperature sensor and the measured temperature value is transmitted to a measuring device. The temperature sensor is disposed inside the substrate's opening or cavity so as to prevent coating of the temperature sensor.

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