Method for the separation of chlorosilanes from a gaseous mixtur

Details Method for the separation of chlorosilanes from a gaseous mixtur Method for the separation of chlorosilanes from a gaseous mixtur

1983-12-14

1984-12-25

Rutledge, L. Dewayne

Chemistry of inorganic compounds

Silicon or compound thereof

Oxygen containing

423342, 423240, 423481, 423644, C01B 3312

Patent

active

044903430

ABSTRACT:
A method for separating chlorosilanes from a gaseous mixture which additionally contains hydrogen and hydrogen chloride by washing the gaseous mixture with saturated hydrochloric acid is disclosed. The resulting chlorosilane hydrolysis products can remain in the hydrochloric acid serving as washing liquid, without interfering with the purifying action. The suspended hydrolysis products are easily filtrable, and can be periodically separated from the hydrochloric acid. In a preferred embodiment, the hydrochloric acid is recirculated and injected into the gas stream being washed.

REFERENCES:
patent: 4252780 (1981-02-01), Koppl

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