Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent
1989-02-26
1990-10-23
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
350527, G01J 120
Patent
active
049654411
ABSTRACT:
Method for the scanning confocal light-optical microscopic and in-depth examination of an extended field and devices for implementing said method. The method consists of forming a principal luminous beam made up of a plurality of secondary luminous beams distinguished from each other by means of at least one of their characteristics, directing the principal luminous beam towards focussing means (30), focussing onto an object to be examined by means of the focussing means (30) at points of different altitude the various secondary luminous beams, sending back the secondary luminous beams reflected by the object to be examined towards a detection system (20), detecting the intensity of the secondary beams, digitally analyzing and processing the signals detected, and of carrying out a scanning of the principal luminous beam as regards all of the object to be studied.
Application for microelectronics inspection.
REFERENCES:
patent: 4515447 (1985-05-01), Weimer
patent: 4530578 (1985-07-01), Kato
patent: 4734578 (1988-03-01), Horikawa
patent: 4843242 (1989-06-01), Doyle
Commissariat a l''Energie Atomique
Hsia Sherrie
Nelms David C.
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