Method for the quality control of material layers

Details Method for the quality control of material layers Method for the quality control of material layers

2005-09-13

2005-09-13

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Dimension

Thickness

C356S630000

Reexamination Certificate

active

06943902

ABSTRACT:
Disclosed is a method for quality control of a material layer, which involves providing the material of the layer with an agent for absorbing an electromagnetic radiation, irradiating the surface of the layer with an electromagnetic radiation, and measuring the amount of light emitted by the material layer, for example, reflected radiation or fluorescence radiation.

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patent: 0838850 (1998-04-01), None
patent: WO 98/18135 (1998-04-01), None
PCT International Preliminary Examination Report for PCT/EP00/12105, filed Dec. 1, 2000.

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