Gas separation: processes – Selective diffusion of gases – Selective diffusion of gases through substantially solid...
Reexamination Certificate
2006-09-19
2006-09-19
Lawrence, Frank M. (Department: 1724)
Gas separation: processes
Selective diffusion of gases
Selective diffusion of gases through substantially solid...
C095S047000, C095S048000, C095S214000
Reexamination Certificate
active
07108737
ABSTRACT:
The present invention relates to a novel process for the preparation of high-purity chemicals with an extremely low particle count, such as ammonia gas, hydrogen fluoride and hydrogen chloride, which are also used as aqueous solutions in semiconductor technology the corrosive gas is enriched with an absorbent which is miscible with the gas and in which impurities present in the gas are soluble, and the gas is subsequently subjected to membrane filtration.
REFERENCES:
patent: 3967941 (1976-07-01), Terao
patent: 4772295 (1988-09-01), Kato et al.
patent: 4781910 (1988-11-01), Van Dijk
patent: 4936880 (1990-06-01), Sundberg
patent: 5196616 (1993-03-01), Lee et al.
patent: 5722442 (1998-03-01), Hoffman et al.
patent: 5749941 (1998-05-01), Jansen et al.
patent: 5753009 (1998-05-01), Sirkar et al.
patent: 5876486 (1999-03-01), Steinwandel et al.
patent: 6165253 (2000-12-01), Sirkar et al.
patent: 6228145 (2001-05-01), Falk-Pedersen et al.
patent: 6355092 (2002-03-01), Jansen et al.
patent: 2001/0051128 (2001-12-01), Hoffman et al.
patent: 1065168 (2001-01-01), None
patent: 53-058975 (1978-05-01), None
patent: WO 9639266 (1996-12-01), None
Internet Document “membrane, semipermeable,” Hawley's Condensed Chemical Dictionary, 14thEdition, John Wiley & Sons, Inc, http://www.knovel.com, 2002.
Chemical Abstracts, vol. 122, No. 10, Mar. 6, 1995, Columbus Ohio, US; abstract No. 110018g, Mukherjee, D. et al.: “Ultrapurification and recycling of hydrofluoric acid etching solutions by reverse osmosis: membrane performance and multicomponent rejection” Seite 270.
Büttner Werner
Fritsch Harald
Himmler Wolfgang
Hostalek Martin
Neumann Ewald
BASF - Aktiengesellschaft
Lawrence Frank M.
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