Method for the production of semiconductor devices with an integ

Details Method for the production of semiconductor devices with an integ Method for the production of semiconductor devices with an integ

1974-09-03

1976-08-10

Hall, Carl E.

Metal working

Method of mechanical manufacture

Assembling or joining

29580, 29583, 29591, 357 81, H01L 21288

Patent

active

039733203

ABSTRACT:
A process for producing a semiconductor device with an integral heatsink involving applying a coating of dielectric to a sheet of semiconductor material, removing part of the dielectric coating by etching to leave specific sink zones, coating the zones with a metal layer, bonding the assembly to a support with adhesive, depositing a layer of metal to the non-adhered surface of the semiconductor sheet in areas corresponding to the sink zones, and removing semiconductor material from the body of the sheet between the sink zones to produce mesa profile units with heatsinks.

REFERENCES:
patent: 3453722 (1969-07-01), Ramsey, Jr. et al.
patent: 3689993 (1972-09-01), Tolar
patent: 3794883 (1974-02-01), Bylander et al.
patent: 3850707 (1974-11-01), Bestland

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