Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
Patent
1988-05-05
1990-08-07
Childs, Sadie
Coating processes
Coating by vapor, gas, or smoke
Carbon or carbide coating
427255, 4272551, C23C 1626
Patent
active
049463705
ABSTRACT:
A method for preparing pyrolytic carbon film having a highly ordered graphite structure which comprises introducing an aromatic compound not having a condensed ring, together with a carrier gas into a reaction chamber, thermally decomposing the aromatic compound at a temperature up to 1,000.degree. C., and depositing the carbon film onto a single-crystalline substrate.
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Higashigaki Yoshiyuki
Inoguchi Toshio
Nakajima Shigeo
Suzuki Tomonari
Yoshimoto Yoshikazu
Childs Sadie
Sharp Kabushiki Kaisha
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