Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate
2006-04-21
2010-06-15
Pham, Thanh V (Department: 2894)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
C438S081000, C438S098000, C257S458000, C257SE31061
Reexamination Certificate
active
07736927
ABSTRACT:
A photodetector is formed in a semiconductor body. A hard mask grating is photolithographically formed on a surface of the semiconductor body. The semiconductor body is etched using the hard mask grating as a mask. The etching is performed down to a predetermined depth. An implantation is performed such that an anode or cathode of the photodetector that has been interrupted during the etching is re-formed.
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Langguth Gernot
Mueller Karl-Heinz
Wille Holger
Infineon - Technologies AG
Nguyen Duy T
Pham Thanh V
Slater & Matsil L.L.P.
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