Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having moving solid-liquid-solid region
Patent
1995-12-27
1997-09-16
Garrett, Felisa
Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth from liquid or supercritical state
Having moving solid-liquid-solid region
117 52, 117 75, 117 87, C30B 2808
Patent
active
056675852
ABSTRACT:
Proposed is a low-cost method for the preparation of a wire-formed crystal of silicon having a diameter of 1 mm or smaller, in which a vertically held starting rod of silicon is melted at one end portion by high-frequency induction heating, a seed crystal is brought into contact with the molten portion and then the seed crystal and the starting silicon rod are pulled apart in the vertical direction at a controlled velocity with a controlled high-frequency power input so that the melt of silicon drawn by the seed crystal is solidified and crystallized into the form of a wire.
REFERENCES:
patent: 4040890 (1977-08-01), Burrus, Jr. et al.
patent: 4421721 (1983-12-01), Byer et al.
patent: 4863526 (1989-09-01), Miyazawa et al.
patent: 4866230 (1989-09-01), Ikeda et al.
8347 Materials Science and Engineering B, vol. B04, Nos. 1/04; 1 Oct. 1989, pp. 1-10, XP000095483; Werner Zulehner; "Status and Future of Silicon Crystal Growth".
Fukuda Tsuguo
Hirasawa Teruhiko
Kamioka Tadashi
Sakaguchi Susumu
Yamada Toru
Dougherty David E.
Garrett Felisa
Shin-Etsu Chemical Co. , Ltd.
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