Method for the preparation of thin layers of tungsten and molybd

Details Method for the preparation of thin layers of tungsten and molybd Method for the preparation of thin layers of tungsten and molybd

1974-08-29

1976-06-15

Smith, Ronald

Coating processes

Coating by vapor, gas, or smoke

Metal coating

427255, 427252, 427294, 427314, 427347, C23C 1102

Patent

active

039638391

ABSTRACT:
Preparation of thin layers of tungsten or molybdenum on a highly temperature-resistant layer substrate by thermal evaporation in a high vacuum, where WO.sub.3 or MoO.sub.3, respectively, is evaporated and the layer substrate is heated so that the oxides are decomposed and a pure tungsten or molybdenum layer is deposited on the layer substrate.

REFERENCES:
patent: 3294654 (1966-12-01), Norman et al.
patent: 3462298 (1969-08-01), Ikeda et al.
patent: 3669724 (1972-06-01), Brand

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