Method for the preparation of regenerable dielectric layers thro

Details Method for the preparation of regenerable dielectric layers thro Method for the preparation of regenerable dielectric layers thro

1983-06-28

1984-10-23

Pianalto, Bernard D.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 79, 4274071, B05D 306

Patent

active

044788754

ABSTRACT:
In the preparation of regenerable dielectric layers through polymerization of gases by means of a glow discharge, a siloxane or a silazane or a mixture of siloxanes and/or silazanes is blown into the region of the glow discharge in addition to monomeric perfluoro-hydrocarbons with the empirical formula (CF.sub.2).sub.n and/or the corresponding perfluorized cyclic alkanes.

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