Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent
1994-04-11
1997-12-09
Warden, Jill
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
134 21, 134 31, B08B 304, B08B 704
Patent
active
056955707
ABSTRACT:
Generally, and in one form of the invention, a method is presented for the photo-stimulated removal of trace metals 16 from a surface 11, comprising the steps of covering the surface 11 with an ambient species 14, exciting the trace metals 16 and/or the ambient species 14 by photo-stimulation sufficiently to allow reaction of the trace metals with the ambient species to form metal products, and removing the ambient species 14 and the metal products from the surface 11.
Other methods are also disclosed.
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Douglas, et al "Photostimulated Removal of Trace Metals", Journal of the Electrochemical Society, vol. 138, No. 9 Sep. 1991. pp.2799-2802.
Sugino, et al., "Characterization of Si-SiO.sub.2 Interfaces Formed after Photo-Excited Cleaning", Extended Abstracts of the 21st Conference on Solid State Devices and Materials, Tokyo, 1989, pp. 417-420.
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Burton Dana L.
Chaudhry Saeed
Donaldson Richard L.
Kesterson James C.
Texas Instruments Incorporated
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