Method for the manufacture of solid electrolyte layers for galva

Details Method for the manufacture of solid electrolyte layers for galva Method for the manufacture of solid electrolyte layers for galva

1982-05-19

1983-11-01

Demers, Arthur P.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204192R, 204192SP, C23C 1500

Patent

active

044129017

ABSTRACT:
The present invention provides a method for the manufacture of solid electrolyte layers for galvanic cells. In accordance with the method of this application, a very thin, firmly adhering, coherent layer of a lithium nitride halogenide is deposited on a substrate by virtue of atomizing the lithium nitride halogenide in a cathode sputtering system. The sputtering system is characterized by a discharge voltage of at least 300 volts and a pressure less than 1.times.10.sup.-1 mb. The system further comprises a plasma-generating gas which should be at least 55% by weight, based on the total weight of gases, helium and/or nitrogen.

REFERENCES:
patent: 4082040 (1978-04-01), Yamashina

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