Method for the manufacture of silicon injection plates and silic

Details Method for the manufacture of silicon injection plates and silic Method for the manufacture of silicon injection plates and silic

1993-10-04

1995-06-06

Dang, Thi

Etching a substrate: processes

Adhesive or autogenous bonding of two or more...

216 99, 216 47, B05B 100

Patent

active

054219523

ABSTRACT:
A method for fabricating silicon injection plates is both highly precise and particularly simple. The silicon injection plate is formed by an upper silicon plate having injection holes and a lower silicon plate having a through opening and channels. The lower silicon plate is fabricated by simultaneous, double-sided etching of silicon.

REFERENCES:
patent: 4733823 (1988-03-01), Waggener et al.
patent: 4808260 (1989-02-01), Sickafus et al.
patent: 4863560 (1989-09-01), Hawkins
patent: 5160577 (1992-11-01), Deshpande

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