Method for the manufacture of plasma-polymer multilayer capacito

Details Method for the manufacture of plasma-polymer multilayer capacito Method for the manufacture of plasma-polymer multilayer capacito

1985-09-18

1986-10-07

Bueker, Richard

Coating processes

Electrical product produced

Condenser or capacitor

427 79, 427123, 427124, 427125, 427404, 4274071, 361305, 361313, 361323, H01G 101

Patent

active

046159088

ABSTRACT:
A method for the manufacture of electrical plasma-polymer multilayer capacitors wherein alternate layers of thin metal conductors and dielectric layers produced by radiation polymerization are deposited on a substrate, after which the portions of the metal layers to which electrical contact is to be made are etched, preferably by sputter etching, to remove oxides therefrom. Then, contact layers are applied to the opposite end faces of the substrate to provide electrical connections for the portions of the metal layers which have been etched, the contact layers consisting of the sequence (1) an aluminum layer, (2) a nickel layer, and (3) a palladium layer.

REFERENCES:
patent: 3476531 (1969-11-01), Brewer et al.
patent: 3757177 (1973-09-01), Buehler
patent: 3988651 (1976-10-01), Hertz
patent: 4482931 (1984-11-01), Yializis

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