Method for the manufacture of microscopically small metal or met

Chemistry: electrical and wave energy – Processes and products

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20412943, C25D 502, C25F 314

Patent

active

040438775

ABSTRACT:
A method of manufacturing microscopically small metal structures which are used in a memory which has cylindrical magnetic domains or magnetic bubbles characterized by creating patterns or channels in a first photo-resist layer disposed on an Ni-Fe layer which was vapor deposited on a storage layer to expose portions of the Ni-Fe layer corresponding to a pattern for guide loop generators, domain annihilators, control lines and/or read lines, electroplating a first gold layer on the Ni-Fe layer, electroplating a Ni-P layer on the first gold layer, and then placing a second and third gold layer successively on top of the Ni-P layer, removing the first photo-resist layer, applying a second photo-resist layer and forming channels or patterns therein to expose portions of the Ni-Fe layer which patterns or channels correspond to the manipulative patterns or domain extenders, electroplating a fourth gold layer in the exposed portions of the Ni-Fe layer, depositing a thick Ni-Fe layer on the fourth gold layer and then removing the second photo-resist layer, applying a third photo-resist layer, exposing and developing the third photo-resist layer to leave the photo-resist layer on the portions to form the detector strips and portions overlapping read line, removing the Ni-Fe layers which have been vapor deposited on the storage layer by etching the zones which are free of the photo-resist and subsequently removing the third photo-resist layer.

REFERENCES:
patent: 3560358 (1971-02-01), Black
patent: 3901770 (1975-08-01), Littwin
patent: 3919055 (1975-11-01), Urban
patent: 3963587 (1976-06-01), Kreckel
AIP Conference Proceedings, No. 5, 1971, pp. 215-219.
Applied Physics Letters, vol. 17, No. 8, Oct. 15, 1970, pp. 328-332.
Journal of Applied Physics, vol. 42, No. 4, Mar. 15, 1971, pp. 1362-1363.

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