Method for the manufacture of a sensor element

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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C029S417000, C029S592100, C029S609000, C029S846000, C156S073100, C156S164000, C156S229000, C156S273300, C156S322000, C156S324000, C216S022000, C216S039000, C216S041000, C310S311000, C310S314000, C310S317000, C310S344000, C381S114000, C381S116000, C381S191000, C427S079000, C427S080000

Reexamination Certificate

active

06996891

ABSTRACT:
The invention relates to a method for the manufacture of a sensor element and to a sensor element. In the method, both surfaces of a sensor film are provided with metallic electrodes. The sensor element is produced by cutting it from a larger amount of sensor element material. In the manufacture of the sensor element material, the electrodes are produced as a continuous process from roll to roll and the sensor element material is formed by laminating as a continuous process from roll to roll. At least the signal electrode consists of repeated electrode patterns which are at least partially connected to each other via one or more narrow connecting strips, and a sensor element of a desired length and/or shape is produced by cutting the material across the region of the connecting strips.

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“Characterization of monolithic n-type 6H-SiC piezoresistive sensing elements”; Shor, J.S.; Bemis, L.; Kurtz, A.D.; Electron Devices, IEEE Transactions on vol. 41, Issue 5, May 1994 pp.:661-665.

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