Method for the manufacture of a self-aligned metal contact

Details Method for the manufacture of a self-aligned metal contact Method for the manufacture of a self-aligned metal contact

1987-03-18

1988-09-27

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437176, 437187, 437203, 437944, 437 41, 156657, 357 15, 148DIG100, 148DIG139, H01L 2128

Patent

active

047742062

ABSTRACT:
The manufacture of a self-aligned gate contact having a very short gate length measuring, for example, 0.3 to 0.1 micron wherein photolithography is carried out together with isotropic deposition to produce a gate contact having an extremely low lead resistance, the method utilizing a masking element which is removed by a lift-off technique.

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