Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Patent
1997-11-07
1999-10-05
Dudash, Diana
Coating processes
Direct application of electrical, magnetic, wave, or...
Pretreatment of substrate or post-treatment of coated substrate
216 2, 216 39, 216 51, 216 94, 216 97, 427154, 427240, 427287, 427309, 427535, 427555, B05D 300
Patent
active
059620811
DESCRIPTION:
BRIEF SUMMARY
The present invention relates to a novel method for manufacturing a microstructure comprising an elastic membrane.
WO 90/05295 discloses an optical biosensor system wherein a sample solution containing biomolecules is passed over a sensing surface having immobilized thereon ligands specific for the biomolecules. Binding of the biomolecules to the sensing surface of a sensor chip is detected by surface plasmon resonance spectroscopy (SPRS). A microfluidic system comprising channels and valves supplies a controlled sample flow to the sensor surface, allowing real time kinetic analysis at the sensor surface.
The microfluidic system is based upon pneumatically controlled valves with a thin elastomer as membrane and comprises two assembled plates, e.g. of plastic, one of the plates having fluid channels formed by high precision moulding in an elastomer layer, such as silicone rubber, applied to one face thereof. The other plate has air channels for pneumatic actuation formed therein which are separated from the fluid channels in the other plate by an elastomer membrane, such as silicone rubber, applied to the plate surface. The integrated valves formed have a low dead volume, low pressure drop and a large opening gap minimizing particle problems. Such a microfluidic system constructed from polystyrene and silicone is included in a commercial biosensor system, BIAcore.TM., marketed by Pharmacia Biosensor AB, Uppsala, Sweden.
The method of manufacturing this microfluidic system, based upon high precision moulding, however, on the one hand, puts a limit to the miniaturization degree, and, on the other hand, makes it time-consuming and expensive to change the configuration of the system.
Elderstig, H., et al., Sensors and Actuators A46: 95-97, 1995 discloses the manufacture of a capacitive pressure sensor by surface micromachining. On a substrate having a silicon oxide layer and a superposed silicon nitride layer, a continuous cavity is etched in the oxide layer through a large amount of small holes in the nitride layer. A polyimide film is then spun on top of the perforated membrane to close the holes.
The object of the present invention is to provide a method which simplifies the fabrication of and permits further miniaturization of microfluidic structures as well as other structures comprising a flexible polymer membrane.
According to the present invention this object is achieved by integrating a polymer deposition process into a fabrication sequence which comprises micromachining of etchable substrates.
In its broadest aspect, the present invention therefore provides a method for the manufacture of a microstructure having a top face and a bottom face, at least one hole or cavity therein extending from the top face to the bottom face, and a polymer membrane which extends over a bottom opening of said hole or cavity, which method comprises the steps of: substrate body, one hole or cavity, substrate body against said membrane support, and, if not done in this step, over the bottom opening of the at least one hole or cavity.
The substrate body is preferably of etchable material and is advantageously plate- or disk-shaped. While silicon is the preferred substrate material, glass or quartz may also be contemplated for the purposes of the invention. The substrate body may also be a composite material, such as a silicon plate covered by one or more layers of another etchable material or materials, e.g. silicon nitride, silicon dioxide etc. Preferred polymer materials are elastomers, such as silicone rubber and polyimide.
The formation of the holes or cavities is preferably effected by etching, optionally from two sides, but partial or even complete formation of the holes may also be performed by other techniques, such as laser drilling.
Deposition of the polymer layer may be performed by spin deposition, which is currently preferred, but also other polymer deposition techniques may be contemplated, such as areosol deposition, dip coating etc.
The application of a membrane support in the form of a sacrificial support la
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Ohman Ove
Vieider Christian
Dudash Diana
Pharmacia Biotech AB
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