Method for the making of surface-emitting laser diodes with mech

Details Method for the making of surface-emitting laser diodes with mech Method for the making of surface-emitting laser diodes with mech

1995-09-07

1997-05-06

Breneman, R. Bruce

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

438 34, 438 39, 438943, 117105, H01R 2122

Patent

active

056271000

ABSTRACT:
A method for making a set of surface-emitting laser diodes comprises the making of reflectors by the epitaxial growth of at least one semiconductor material through a mask having apertures with inclined flanks. This method leads to the obtaining of the Bragg reflectors obtained in situ, removing the need for the ion etching of a semiconductor substrate followed by a phase for the conditioning of the surface of the sample before the preparation of the desired laser structure.
Application: optical power source.

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Applied Physics Letters, vol. 61, No. 13, Sep. 28, 1992, pp. 1487-1489; Donnelly, J. P., et al.; High Quantum Efficiency Monolithic Arrays of Surface-Emitting Algaas Diode Lasers With Dry-Etched Vertical Facets and Parabolic Deflecting Mirrors'.

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