Optical waveguides – With optical coupler – Particular coupling structure
Patent
1996-07-10
1998-08-11
Ullah, Akm E
Optical waveguides
With optical coupler
Particular coupling structure
372 46, 359250, 257 13, G02B 630
Patent
active
057939136
ABSTRACT:
A method and apparatus is provided for locating with improved vertical positioning accuracy a discrete element on a semiconductor optoelectronic integrated circuit. The method employs an etch stop layer located beneath a series of semiconductor layers. The semiconductor layers may include waveguides to couple light between integrated or discrete elements. Pits with accurate depth are etched in the semiconductor layers down to the etch stop layer. Accurate alignment between a discrete element and another element is made possible by controlling their respective distances from the etch stop layer.
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Northern Telecom Limited
Ullah Akm E
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