Method for the glow-discharge-activated reactive deposition of e

Details Method for the glow-discharge-activated reactive deposition of e Method for the glow-discharge-activated reactive deposition of e

1986-04-28

1987-12-15

Pianalto, Bernard D.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

156637, 156646, 156663, 156667, 427105, 427107, 4271262, 4271263, 427237, 427239, 427292, 427309, 4273981, B05D 306

Patent

active

047132590

ABSTRACT:
For the reactive deposition of tubular bodies of electrically conductive material from a flowing gas phase on a tubular substrate, a glow discharge 11 is produced between an inner electrode 6 and an outer electrode 2, one of which is constructed so as to be tubular and serves as a substrate. It is ensured that the electrodes 2, 6 are not short-circuited by growing conductive surface layers so that the glow discharge 11 extinguishes. Furthermore, the electrically conductive coating on the electrode 6 which does not function as the substrate electrode is interrupted in an insulating manner to locally limit the glow discharge 11. For example, by a gas barrier the deposit of an electrically conducting material on the insulation can be avoided. The glow discharge 11 is reciprocated during the deposition process.

REFERENCES:
patent: 4262035 (1981-04-01), Jaeger et al.

Affiliated with

Also associated with

Rating

Method for the glow-discharge-activated reactive deposition of e does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for the glow-discharge-activated reactive deposition of e, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for the glow-discharge-activated reactive deposition of e will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1219257