Method for the global planarization of surfaces of semiconductor

Details Method for the global planarization of surfaces of semiconductor Method for the global planarization of surfaces of semiconductor

1993-11-17

1995-08-29

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437978, H01L 21465

Patent

active

054459982

ABSTRACT:
A method for the global planarization of surfaces of semiconductor integrated circuits which involves etching back an auxiliary layer made of a dielectric with a single auxiliary photoresist step is disclosed.

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