Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent
1991-03-11
1992-06-23
Pianalto, Bernard
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
4272555, 427314, 4273722, C23C 1600
Patent
active
051241803
ABSTRACT:
The invention relates to a method of producing a substantially haze free, fluorine doped metal oxide coating on a substrate such as glass. The method includes the steps of heating a surface of the substrate to be coated, contacting the surface with a vapor including a metal oxide precursor, an oxidizing agent, and a dopant containing a chemically reactive vinylic fluorine atom, and thermally oxidizing the vapor into a fluorine containing metal oxide film.
Another feature of the invention is an apparatus for producing a uniform, substantially haze free, fluorine containing metal oxide thin film coating on a substrate such as glass. The apparatus includes a heater to heat the substrate to between approximately 450.degree. and 600.degree. C. and a conveyor to convey the heated substrated to a reaction zone adjacent an injector head. The injector head produces a vapor containing a metal oxide precursor, an oxidizing agent, and a dopant containing a chemically reactive vinylic fluorine atom. The vapor is oxidized into a fluorine containing metal oxide coating on the substrate.
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BTU Engineering Corporation
Pianalto Bernard
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