Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1996-08-15
1998-01-06
Font, Frank G.
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359290, 359292, G02B 2600
Patent
active
057061220
ABSTRACT:
A method for the manufacture of an array of M.times.N thin film actuated mirrors for use in an optical projection system is disclosed. The method includes the steps of: providing an active matrix; depositing a thin film sacrificial layer; creating an array of empty cavities in the thin film sacrificial layer; forming an array of actuating structures on top of the thin film sacrificial layer including the empty cavities, each of the actuating structures including a first thin film electrode, a thin film electrodisplacive member, a second thin film electrode and an elastic member; forming a thin film protection layer completely covering each of the actuating structures; removing the thin film sacrificial layer by using an etchant; rinsing away the etchant by using a rinse which is DI water or hydrophilic and volatile; removing the rinse by a spin drying method followed by a heat treatment; and removing the thin film protection layer, thereby forming the array of thin film actuated mirrors.
REFERENCES:
patent: 5107533 (1992-04-01), Jaskie
patent: 5124834 (1992-06-01), Cusano et al.
patent: 5506720 (1996-04-01), Yoon
Daewoo Electronics Co. Ltd.
Font Frank G.
Ratiff Reginald A.
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