Optics: measuring and testing – Standard
Reexamination Certificate
2007-12-11
2007-12-11
Lee, Hwa (Andrew) (Department: 2886)
Optics: measuring and testing
Standard
C356S388000, C356S397000
Reexamination Certificate
active
11112748
ABSTRACT:
The structure size of a structure (100) is measured by forming an auxiliary measured value (Dx′, Dy′). A calibration measured value (Px′, Py′) is determined on the basis of a calibration structure (110), which comprises at least two structure elements (140) at a distance from one another, including at least the measured value sum of the width (By′) of one of the two structure elements (140) and the distance (Ay′) between the two structure elements (140). The calibration measured value (Px′, Py′) and a predetermined calibration preset value (Px, Py), which relates to the calibration structure (110), result in the determination of a calibration factor (C, Cx, Cy). The auxiliary measured value (Dx′, Dy′) is corrected using the calibration factor (C, Cx, Cy) in order to form the structure size measured value (Dx,k; Dy,k).
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Infineon - Technologies AG
Lee Hwa (Andrew)
Pajoohi Tara S.
Slater & Matsil L.L.P.
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