Method for the fabrication of multilayer electroluminescence dev

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313463, 313502, 313504, 313506, 2523016R, 25230165, H05B 3314

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active

056438290

ABSTRACT:
There is provided a method for the fabrication of multilayer electroluminescence device, comprising the steps of: forming a lower electrode with a predetermined pattern on a substrate: forming a first insulation layer on the lower electrode atop the substrate; forming a multiply luminescent layer consisting of CaS and SrS on the first insulation layer at the same temperature with that for the first insulation layer; forming a second insulation film on the luminescent layer; and forming an upper electrode with a predetermined on the second insulation layer.
In the multiply luminescent layer, a plurality of CaS plies and a plurality of SrS plies are formed in such a way that the CaS plies and the SrS plies alternate with each other and the outmost upper and lower plies are formed of CaS.
The constituent substances for the multiply luminescent layer, CaS and SrS, can be deposited at the same temperature and have similar lattice constants which can lead to a matched interface between the CaS and SrS plies. By virtue of these advantages, stresses imposed on the interface, including thermal stress, can be significantly reduced.
In addition, the matched interface makes electrons be accelerated with large energy, so that the fabricated multilayer luminescence device may show good quality.

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