Method for the fabrication of micro-electromechanical ceramic pa

Details Method for the fabrication of micro-electromechanical ceramic pa Method for the fabrication of micro-electromechanical ceramic pa

1996-11-14

1997-11-04

Fiorilla, Christopher A.

Plastic and nonmetallic article shaping or treating: processes

Outside of mold sintering or vitrifying of shaped inorganic...

Of electrical article or electrical component

264635, 264643, C04B 4100

Patent

active

056836490

ABSTRACT:
Micro-electromechanical ceramic parts are formed using green ceramic and a sacrificial material that has a higher melting temperature than the sintering temperature of the green ceramic to form electrical trace paths. After the sintering of the ceramic part the sacrificial material is removed by etching or by elevating the temperature of the part above the melting temperature of the sacrificial material. The void left by the removal of the sacrificial material is then filled with a molten metal which when cooled forms the electrical trace for the fabricated part.

REFERENCES:
patent: 4994215 (1991-02-01), Wiech, Jr.
patent: 5240671 (1993-08-01), Carey

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