Method for the determination of nitrogen concentration in compou

Chemistry: analytical and immunological testing – Nitrogen containing

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436114, 436164, G01N 2159

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057312095

ABSTRACT:
An efficient method is proposed for the determination of the concentration of nitrogen in an indirect-transition compound semiconductor such as gallium phosphide added as an isoelectronic trap. The method utilizes the fact that a good correlation of proportionality is held between the nitrogen concentration and the difference .DELTA..alpha.(=.alpha..sub.N -.alpha.) in the absorption coefficient of light of a wavelength identical with the wavelength .lambda..sub.N due to the excitons under constraint in the isoelectronic trap between the semiconductors with (.alpha..sub.N) and without (.alpha.) addition of nitrogen. A working curve is presented between the nitrogen concentration determined by the method of SIMS and the value of .DELTA..alpha..

REFERENCES:
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Thierry-Mieg, V. et al. "Determination of the nitrogen doping of liquid phase epitaxy GaP and alloys by optical absorption and photoluminescence" J. Appl. Phys., vol. 54, No. 9 (Sep. 1983) pp. 5358-5362.
Riede, V. et al. "Nitrogen Concentration in GaP:N Epitaxial Layers from Localized Mode Absorption Measurments" Physica Status Solidi (a), vol. 89, No. 2, (Jun. 1985) pp. K147-K151.
Donecker, J. et al., Proceedings of the International Conference Radiative Recombination in III-V Compound Semiconductors, (1979) pp. 43-47.
Yu, R., Journal of Xiamen University Natural Science, (1992) pp. 152-155.
Lupal et al., "Determination of the Nitrogen Concentration in Epitaxial Layers of GAASP by the Optical Method", Inorganic Materials, vol. 22, No. 2, 1986, pp. 157-161.
Kloth et al., "Determination of the Nitrogen Concentration in VPE-GAASP", Physica Status Solidi A., vol. 100, No. 2, 1987, pp. 545-552.
Hansel et al., "Determination of Nitrogen Concentration in GAP Epitaxial Layers by Two Independent Methods", Kristall Und Technik, vol. 14, No. 8, 1979, pp. 977-984.
Thomas et al., "Isoelectronic Traps Due to Nitrogen in Gallium Phosphide", Physical Review, vol. 150, No. 2, 1966, pp. 680-689.

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