Electric lamp and discharge devices: systems – With load device temperature modifier
Patent
1990-06-04
1991-08-13
LaRoche, Eugene R.
Electric lamp and discharge devices: systems
With load device temperature modifier
313 22, 313 35, H01J 724
Patent
active
050399136
ABSTRACT:
The rear surface of an sputtering target (1) is actively cooled exclusively in regions spaced from breakthrough-prone regions. The cooling takes place in regions along the erosion profile outside of the regions of greatest erosion rate. For this purpose a cooling device for the target (1) has channels (7) through which a coolant flows. These channels (7) extend outside the regions (4) of strongest erosion of the target (1). The cooling channels (7) have on the side facing the back surface of the target, one foil-like closure wall (10). The cooling channels (7) extend in a cooling plate (6) and are separated from each other by webs (8). The webs (8) extend in the region of strongest erosion (4) of the target (1) in order to mechanically support these regions (4). Therewith it is possible to utilize expensive target material to the limit of its removal, without however risking a breakthrough of the target due to the erosion in an area where coolant will leak.
REFERENCES:
patent: 4891560 (1990-01-01), Okumura et al.
patent: 4911814 (1990-03-01), Matsuoka et al.
Haag Walter
Wegmann Urs
Balzers Aktiengtesellschaft
LaRoche Eugene R.
Yoo Do Hyun
LandOfFree
Method for the cooling of targets as well as cooling device for does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for the cooling of targets as well as cooling device for , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for the cooling of targets as well as cooling device for will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1529922