Fishing – trapping – and vermin destroying
Patent
1993-02-26
1994-01-11
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437978, 437982, H01L 21473
Patent
active
052781038
ABSTRACT:
A method is provided for the controlled formation of voids in integrated circuit doped glass dielectric films. The film can be formed of borophosphosilica glass (BPSG) or other types of doped glass. The method involves the steps of providing a substrate on which conductors are formed, depositing a first layer of doped glass to a thickness in a predetermined ratio to the size of the space between conductors, reflowing the first doped glass layer, applying one or more additional doped glass layers to make up for any shortfall in desired total doped glass thickness, and performing a high temperature densification to smooth each additional layer. The method provides for increased integrated circuit speed by controlled formation of voids which have a low dielectric constant and therefore reduce capacitance between adjacent conductors. The method can be performed using existing doped glass deposition and reflow equipment.
REFERENCES:
patent: 4571819 (1986-02-01), Rogers et al.
patent: 4758306 (1988-07-01), Cronin et al.
patent: 5004704 (1991-04-01), Maeda et al.
patent: 5166101 (1992-11-01), Lee et al.
Hsia Wei-Jen
Kao Chi-yi
Mallon Thomas G.
Shimoda Atsushi
Chaudhari Chandra
Hearn Brian E.
LSI Logic Corporation
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