Method for the control of an evaporation process

Details Method for the control of an evaporation process Method for the control of an evaporation process

1990-06-26

1991-08-20

Albritton, C. L.

Electric heating

Metal heating

By arc

21912112, 21912135, 250397, 250399, B23K 1500

Patent

active

050417126

ABSTRACT:
A method and apparatus for controlling, regulating and measuirng the particle mass which is evaporated per unit time from a target by a charged particle beam, in particular an electron beam, comprises the varying of an impingement area of the beam on the target in a manner which is decoupled from control of the position of the impingement area and control of the mass current of the beam. The impingment area may be modulated for varying the particle mass and the particle mass can be measured by also using a modulation step in conjunction with a particle detector and a beam modulation step.

REFERENCES:
patent: 3420977 (1969-01-01), Hanks et al.
patent: 4064352 (1977-12-01), Mann
patent: 4264822 (1981-04-01), Ueno et al.
patent: 4988872 (1991-01-01), Nagatsuka et al.
patent: 5001344 (1991-03-01), Kato et al.
patent: 5008537 (1991-04-01), Toita et al.

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