Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate
2005-05-24
2005-05-24
Nguyen, Vinh P. (Department: 2829)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
C324S765010
Reexamination Certificate
active
06897646
ABSTRACT:
The invention provides a method for testing wafers (101) to be tested in a test device (100), in which the test device (100) can be calibrated, at least one calibration wafer (102) being automatically introduced into the test device (100) by means of a handling unit (103), calibration values of the test device (100) being determined by means of a control by a calibration sequence control unit (105), the calibration values determined being stored in a memory unit (106), the test device (100) being calibrated by means of the stored calibration values, the calibration wafer (102) being output from the calibrated test device (100), and at least one wafer (101) to be tested being introduced into the calibrated test device (100) by means of the handling unit (103) and being tested by a control by means of a test sequence control unit (104) in the calibrated test device (100), the stored calibration values being applied.
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Grebner Thomas
Ostendorf Hans-Christoph
Schittenhelm Michael
Thalmann Erwin
Infineon - Technologies AG
Jenkins & Wilson & Taylor, P.A.
Nguyen Vinh P.
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