Method for testing the leakage rate of vacuum encapsulated...

Details Method for testing the leakage rate of vacuum encapsulated... Method for testing the leakage rate of vacuum encapsulated...

2005-11-10

2010-06-22

Larkin, Daniel S (Department: 2856)

Measuring and testing

With fluid pressure

Leakage

C073S049300

Reexamination Certificate

active

07739900

ABSTRACT:
The present invention is directed to a method for testing the leakage rate of an encapsulated device comprising the step: bombing the device with a neon and/or argon atmosphere using a bombing pressure of at least more than environmental pressure and measuring the quality factor before and after bombing. Preferably, the bombing time is about 10 to 100 hours, and the bombing pressure is 1.5 to 100 bar, more preferably 1.5 to 5 bar and most preferably about 4 bar. With this test, the leakage rate of fine leaks of the device may be determined.

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