Method for testing pressure sensors

Measuring and testing – Instrument proving or calibrating – Fluid pressure

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G01L 2700

Patent

active

059005300

ABSTRACT:
Pressure sensors that are fabricated to sense low pressures are tested and calibrated by providing a controlled gas flow or leak to create a pressure during testing. Rather than placing the pressure sensor in a sealed environment, a controlled leak of a gas is used to induce a stable and controllable pressure region over the pressure sensor during testing. The stable low pressure region is monitored via a sensing tube.

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