Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1982-11-17
1984-02-28
Newsome, John H.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427113, 427122, 423446, 204173, B05D 314
Patent
active
044341881
ABSTRACT:
A method for synthesizing diamond wherein hydrogen gas which has passed through a micro-wave non-electrode discharge and mixed with hydrocarbon gas, or a mixture gas consisting of hydrocarbon and hydrogen after its passing through a micro-wave non-electrode discharge, is introduced onto the surface of a substrate heated to a temperature of from 300.degree. to 1300.degree. C. to decompose hydrocarbon in its energetically activated state for the diamond deposition.
REFERENCES:
patent: 3661526 (1972-05-01), Angus et al.
patent: 4191735 (1980-03-01), Nelson et al.
patent: 4382100 (1983-05-01), Holland
Thin Solid Films, v. 58, (1979), pp. 107-116, Elsevier Sequoia, S. A., Lausanne.
Journal of Crystal Growth, v52, (1981), pp. 219-226.
Crystal Research and Technology, v16, #7, (1981), pp. 785-788.
Journal of Crystall Growth, v47, (1979), pp. 421-426.
J. Appl. Phys. v52, (#10), Oct. 1981, pp. 6151-6157.
Kamo Mutsukazu
Matsumoto Seiichiro
Sato Yoichiro
Setaka Nobuo
National Institute for Researches in Inorganic Materials
Newsome John H.
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