Method for surface treatment of carbon catalyst

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

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156623R, 502180, C23C 1500

Patent

active

044655762

ABSTRACT:
A carbon catalyst is activated by subjecting the carbon catalyst to a treatment of dry etching utilizing the activity of low-temperature plasma generated by electric discharge under vacuum.

REFERENCES:
Baker et al., Thin Solid Films, 69, (1980), pp. 359-368.
Berg et al., J. Vac. Sci. Tech. 13, (1976), pp. 403-405.
DeGraf et al., J. Vac. Sci. Tech., 16 (1979), pp. 1906-1908.
Holland et al., Vacuum; 26 (1976), pp. 233-236.
Rizk et al., Vacuum 27, (1977), pp. 601-604.

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