Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1983-09-30
1984-06-05
Hoffman, James R.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 40, B05D 702
Patent
active
044528272
ABSTRACT:
A low energy electron beam of ions of an element to be imparted in polymeric material is formed and accelerated, the beam being subjected to electromagnetic separation so that only a high purity stream of the ion of this element impinges upon the substrate for implantation herein.
REFERENCES:
patent: 4199650 (1980-04-01), Mirtich et al.
Amov Blagoy G.
Djakov Assen E.
Kolev Kolyo T.
Peeva Lilly B.
Stoyanov Stoyan B.
Dubno Herbert
Hoffman James R.
Institute Za Yadreni Izsledvaniya I Yadrena Energetika
Ross Karl F.
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